Original
By certification 
Basic type of CP machines can meet the application demand of chemical mechanical polishing in most occasions. The equipment adopts labyrinth single path polishing plate cooling structure to effectively ensure the uniformity of heat dissipation and the maintenance of plate shape during polishing process, so as to ensure the polishing accuracy in terms of hardware. The used of large-size low friction cylinder specially designed and made by LSTD ensure the processing strength as well as the process accuracy.
Type and spec |
CP-380B(V*) |
CP-460B(V) |
CP-610B(V) |
CP-810B(V) |
CP-910B(V) |
CP-1280B(V) |
CP-1500B(V) |
Polishing Plate diameter |
381mm |
460mm |
610mm |
812mm |
914mm |
1282mm |
1500mm |
Pressure plate diameter |
139mm |
150mm |
240mm |
304.8mm |
360mm/355mm |
485mm |
576mm |
No. of pressure plate |
3 |
4 |
4 |
4 |
4 |
4 |
4 |
Polishing plate RPM |
10~160rpm |
10~160rpm |
10~115rpm |
10~87rpm |
10-80rpm |
10~64rpm |
10-54rpm |
Polishing pressure(max.) |
100kg |
100kg |
140kg |
250kg |
320kg |
560kg |
760kg |
Motor power |
0.75kw |
1.5kw |
3kw |
5.5KW |
11kw |
22kw |
35kw |
Power supply |
3PH,380V,50Hz |
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Dimension |
950L 770W 1560H |
1100L 850W 1650H |
1350L 900W 1700H |
1600L 920W 1900H |
1800L 1262W 2120H |
2180L 1670W 2200H |
2800L 2020W 2500H |
Weight ( Approx..） |
350kg |
650kg |
980kg |
1800kg |
2200kg |
7000kg |
8600kg |
Wafer loading capacity |
2"-4pcs/head 2"-3pcs/head(V) |
2"-5pcs/head 2"-4pcs/head(V) |
2"-10pcs/head 4"-3pcs/head |
2"-14pcs/head 4"-5pcs/head 5"-3pcs/head |
4"-7pcs/head 5"-5pcs/head 6"-3pcs/head |
5"-8pcs/head 6"-6pcs/head 8"-3pcs/head |
6"-8pcs/head 8"-5pcs/head |
*V represents vacuum chuck
Basic function polishing slurry supplying tank can be used with Basic type of CP machines, while some professional slurry management system can also be used. LSTD developed a series of polishing slurry management systems to realize the control functions of polishing slurry like supplying, recirculation, filtering, temperature stabilizing , PH control , to ensure a stable polishing process.
http://www.lstd-cn.com/
